SILICON CARBIDE (SIC) TRAYS OR PLATE, AS A WAFER HOLDER FOR ICP ETCHING PROCESS IN LED INDUSTRY

Silicon Carbide (SiC) Trays or Plate

Silicon Carbide (SiC) Trays or plate used as a wafer holder for ICP etching process in LED industry.

Silicon carbide (SiC) is a has excellent thermal conductivity, corrosion resistance, and with low thermal expansion. Silicon carbide is an excellent material for sealing rings and bearings. Silicon carbide trays have excellent corrosion resistance, great wear resistance, great mechanical strength under high temperatures. We supply many sizes of silicon carbide trays as well as other SiC products.

Silicon Carbide Trays Properties

Silicon Carbide Tray Specifications

Feature requirement:

1. Excellent thermal conductivity
2. Resistant to plasma shock
3. Good temperature uniformity

Silicon Carbide Tray Applications

-Silicon carbide can be applied in areas such as semiconductor and coating.
-Our silicon carbide trays are widely used in LED industry.

Packing of Silicon Carbide

Our Silicon Carbide Trays are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.

3.2g/Cm3 Density Silicon Carbide Plates

99.5% SiC Silicon Carbide Ceramics

88% SiC Trays

SILICON CARBIDE (SIC) TRAYS OR PLATE, AS A WAFER HOLDER FOR ICP ETCHING PROCESS IN LED INDUSTRY Images